grinder_data

A dataset containing the thickness measurements in nm
at different positions on the silicon wafer

datasets

The purpose of 'PH1XBAR' is to build a Phase I Shewhart control chart for the basic Shewhart, the variance components and the ARMA models in R for subgrouped and individual data. More details can be found: Yao and Chakraborti (2020) <doi: 10.1002/qre.2793>, Yao and Chakraborti (2021) <doi: 10.1080/08982112.2021.1878220>, and Yao et al. (2023) <doi: 10.1080/00224065.2022.2139783>.

Yuhui Yao

PH1XBAR

Phase I Shewhart X-Bar Chart

Subha Chakraborti

Tyler Thomas

Jason Parton

Xin Yang

grinder_data function

A matrix with 30 rows and 5 variables:<dl>
 <dt>pos1</dt>
<dd>Thickness measurement at Position 1 (outer circle)</dd> <dt>pos2</dt>
<dd>Thickness measurement at Position 2 (outer circle)</dd> <dt>pos3</dt>
<dd>Thickness measurement at Position 3 (middle circle)</dd> <dt>pos4</dt>
<dd>Thickness measurement at Position 4 (middle circle)</dd> <dt>pos5</dt>
<dd>Thickness measurement at Position 5 (inner circle)</dd>
</dl>

Format

Thickness measurement of silicon wafer — grinder_data

A matrix with 30 rows and 5 variables:<dl>
 <dt>pos1</dt>
<dd>Thickness measurement at Position 1 (outer circle)</dd>

 <dt>pos2</dt>
<dd>Thickness measurement at Position 2 (outer circle)</dd>

 <dt>pos3</dt>
<dd>Thickness measurement at Position 3 (middle circle)</dd>

 <dt>pos4</dt>
<dd>Thickness measurement at Position 4 (middle circle)</dd>

 <dt>pos5</dt>
<dd>Thickness measurement at Position 5 (inner circle)</dd>


</dl>

grinder_data: Thickness measurement of silicon wafer

Description

Usage

Arguments

Format

References